Complexity in Nanotechnology and Nanoelectronics

Vassilios Constantoudis
Institute of Nanoscience and Nanotechnology, NCSR Demokritos
Nanometrisis p.c.
Agia Paraskevi, Greece
v.constantoudis@inn.demokritos.gr

Abstract: During the last 20 years, we have been witnessing a tremendous advancement of nanotechnology with an impact on several scientific and technological areas such as materials, electronics, photonics, medicine, and manufacturing to name just a few. The common basis in all cases is the novel properties and functionalities induced by the nanostructuring of surfaces and bulk of materials. However, the benefits of nanostructuring are counterbalanced by the challenge of stochastic effects which prevail as we are moving to nanoscale dimensions due to the enhanced fluctuations and variances in material density and compositions, and process rates. These effects lead to random-like stochastic nanomorphologies which degrade the repeatability of nanostructured devices and the control of their performance. Therefore, the quantitative characterization of nanostochasticity is a prerequisite to providing accurate and complete metrology of nanostructures and control of their fabrication and properties.

In this presentation, we use concepts and methods of complex systems properly modified to contribute to this challenge and offer alternative ways for the quantification of stochastic nanomorhologies encountered in specific nanostructured surfaces used in both nanotechnology and nanoelectronics. The motivation comes from the fact that in most cases nanomorphologies lie between fully ordered and fully random extremes and hence can be considered in the context of complex systems. In particular, we will apply fractal and multifractal analysis, multiscale entropy, chaotic dynamics, hierarchy approach, and network theory to unveil quantitative aspects of rough surfaces and structures used in nanoelectronics devices and multifunctional surfaces.